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Introducing the Ultimate in Non-Contact Laser Measurement pdf_icon
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18 pages
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Introducing the Ultimate in Non-Contact Laser Measurement
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Thickness
 
Runout
 
Eccentricity
Thickness Runout Eccentricity
Measuring the thickness of a silicon wafer   Measuring the runout of an ultra-compact HDD   Measuring the eccentricity of an ATC tool
Thickness   Runout   Eccentricity
[μm] sampling rate: 50μs
 
[μm] sampling rate: 20μs
 
[μm] sampling rate: 50μs
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Introducing the Ultimate in Non-Contact Laser Measurement  
pdf icon Introducing the Ultimate in Non-Contact Laser Measurement
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