	Displacement Sensors

Measurement Principle of Double Scanning Method

Basic Principle

High precision using confocus and tuning fork

High-precision Measurement Using Confocus and Tuning Fork

The laser beam passes through the object lens, which rapidly moves up and down, based on the movement of the tuning fork, and focuses on the object. The reflected light is then concentrated at the pinhole, through which it enters the light-receiving element. By measuring the location of the object lens just after the entry of the beam into the light receiving element, the distance to the object is measured, unaffected by material, color, or gradient.

Accurate scanning with the oscillation unit

Highly Accurate Scanning with Oscillating Unit

The highly accurate oscillating mechanism enables a 2 µm spot to be migrated horizontally by up to 1100 µm. The introduction of this scanning method has also enabled measurements of shape, angle, and area.

Details of the use of the oscillation unit

Scanning Width Variable as Required

The laser scanning width is adjustable according to your requirement and the surface conditions of the object. Moreover, computing the scanned data has enabled reliable displacement measurement.

Features

	Measuring the distance at the focal position means it is unaffected by any changes in the surface reflectance ratio.
	In addition, the fact that the transmitter and receiver are located on the same axis eliminates any possible error relating to the gradient or entry direction of the object.
	The spot diameter of the laser beam remains unchanged across the entire measurement area.
	Because the refractive index changing point can be identified, the film thickness can be measured from one side of a workpiece. (when transparent objects are used)
	Allows high angle characteristics to be achieved.
	With X axis scanning, various measurements are possible. (measurements of shape, angle)

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