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Your guide to Displacement Sensors
Guide Topics
Displacement Sensors
Semiconductor laser displacement sensors and meters
Inductive (eddy current) displacement
CCD Laser Displacement Sensor (LK Series)
Measurement Principle of Double Scanning Method
Measurement Principle of Laser Confocal Microscope
Optical Micrometers
Hints on Correct Use
Glossary
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Technical Glossary

World Standards Information

LK-G High-speed, High-accuracy CCD Laser Displacement Sensor
LK Series Ultra-accuracy CCD Laser Sensor
LC3 Ultra-high Accuracy Laser Sensor
LT-9000 High-accuracy Confocal Laser Displacement Meter
RD Analog Sensor Controllers
LT Series Confocal Laser Meter
LK-3100 Ultra-Compact CCD Laser Sensor
LB-1000 High Accuracy Laser Sensor
EX-V Digital, High Speed/Accuracy Sensor
EX-500 High Accuracy Sensor
EX-200 High-speed Response Sensor
LS-7000 High Speed LED/CCD Optical Micrometer
LS-5000 Laser Scan Micrometer
LX2-V Laser Thrubeam Photoelectric Sensor
Increasing Measurement Range
Electronics & Electronic Component Industry Guide
Semiconductor/FPD/Food/
Pharmaceutical Industry Guide
Ultra-Long Range Laser Displacement Sensor
Rubber/Plastic/Film/Metal Industry Guide
Displacement Sensors
  

Inductive (eddy current) displacement

Operating Principle

Inductive displacement sensors utilize a high-frequency magnetic field which is generated by passing a high frequency current through the sensor head coil. When a metal target is present in the magnetic field, electromagnetic induction causes an eddy current perpendicular to the magnetic flux passage to flow on the surface of the target. This changes the impedance of the sensor head coil.
Inductive displacement sensors measure the distance between the sensor head and target, based on this change in oscillation status.
How inductive (eddy current) sensors work

KEYENCE inductive displacement sensors utilize two variations of this operating principle.
EX-500 Series
As the target comes closer to the sensor head, the oscillation amplitude becomes smaller and the phase difference from the reference waveform becomes larger. By detecting changes in the amplitude and phase, the sensor can obtain a value approximately proportional to the change in the distance between the sensor head and target.
Amplitude and phase variations with distance
Based on the target material, values are digitally processed and corrected using a high accuracy linearizer circuit. The linear output is proportional to the distance between the sensor head and target.

[EX-200 Series
As the target approaches the sensor, the eddy current increases and oscillation amplitude becomes smaller. The oscillation amplitude is rectified and amplitude variations are converted to DC voltage variations. With its linearization circuit, the EX-200 Series corrects the output voltage-distance characteristic in order to optimize linearity.

Linearization of analog output voltage
Chart of linearization of analog output voltage
Diagram of target placement
Linearized output signal

Effective Use

Measures to waterproof the sensor head

Inductive displacement sensor measures the distance between the sensor head and target using a magnetic field, so sensor operation is unaffected by a non-metallic objects. The EX Series sensor is highly water and dust resistant, and is highly resistant to harsh environments. However, the sensor head is not completely waterproof. Therefore, when using the sensor head in a location exposed to water or oil splash, we recommend that the following measures be taken.
Examples of waterproofing methods
Examples of waterproofing methods

About Mutual Interference

If sensors of the same type are placed closely together, the resolution may be affected due to the high-frequency magnetic field of the sensors. This is called mutual interference.

How to prevent mutual interference?
Use the mutual interference suppression function.(EX-500 series/EX-V series : Keyence)
Maintain enough distance from other devices to prevent interference. ( See description of the respective model.)
Combine with a different type sensor.
( EX-200, AS series: Keyence - For more details, please contact us separately. )

More on this topic...
-> A Desktop Reference for Sensors, Vision Systems and Measuring Instruments. General Catalog
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Non-contact Measuring Instruments Introduction Guide Non-contact Measuring Instruments Introduction Guide
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